Analysis on the driving characteristic of a shuffle MEMS
  Revised:January 17, 2002
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KeyWord:MEMS,shuffling,the coupled mechanics electricity,nonlinear bending,the driving characteristic
Yang Xiaobin  \ Zhou Youhe *\  
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      Based on thin plate and electrical theories, this paper establishes a nonlinear coupling model of the element that is actuated by the electrical field in the shuffling MEMS, to which the geometrical nonlinear deformation, electric charge and electric field force distribution with relation to the deformation are taken into account. On account of above theories, adopted the method of moment combining with the incremented finite element method and gives the characteristic relation between the shuffling displacement and controlling voltage by the bending deformation before the instability.